论文部分内容阅读
针对环形气囊抛光光学元件表面时产生的抛光非均匀性现象,简要介绍了环形气囊抛光技术的运动方式和实验平台的主要组成部分。介绍了环形气囊的抛光机理,基于Preston方程,分析了抛光非均匀现象产生的原因和解决途径,通过调整环形气囊抛光头与工件之间的相对运动方式和调整环形气囊抛光头与工件之间的相对位置等两种方法,消除了工件中心抛光效果差的现象,实现了工件表面的均匀性抛光。
Aiming at the phenomenon of polishing inhomogeneity produced when the annular airbag is buffed on the surface of the optical element, the movement pattern of the annular airbag polishing technique and the main components of the experimental platform are briefly introduced. This paper introduces the polishing mechanism of annular airbag and analyzes the causes and solutions of polishing nonuniformity based on the Preston equation. By adjusting the relative movement between the annular airbag polishing head and the workpiece and adjusting the relationship between the annular airbag polishing head and the workpiece Relative position and other two methods, eliminating the phenomenon of poor polishing the workpiece center to achieve the uniformity of the workpiece surface polishing.