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根据光学玻璃元件超精密抛光加工技术的需求,研究了磁性复合流体(MCF)抛光液成分配比及制备,并在此基础上结合不同抛光工艺参数实验分析BK7光学玻璃的抛光质量。研究不同成分配比下的磁性复合抛光头的物理表现,在MCF各成分质量分数为铁粉55%、水30%、氧化铈12%以及α-纤维素3%时,获得形状及稳定性最佳的MCF抛光头;采用该比例配制的MCF在自行研制的MCF抛光设备上对BK7玻璃进行定点抛光,对MCF抛光头正压力及BK7玻璃抛光后的表面粗糙度进行研究。通过实验数据分析发现抛光正压力随主轴转速的增大而增大,随磁铁偏心距的增大而减小,经过50min定点抛光,表面粗糙度从10.2nm降低到6.7nm。上述结果表明所制备MCF满足光学玻璃超精密抛光加工的需求。
According to the requirement of ultra-precision polishing technology of optical glass components, the composition and preparation of magnetic composite fluid (MCF) polishing solution were studied. Based on this, the polishing quality of BK7 optical glass was experimentally analyzed with different polishing process parameters. The physical performance of the magnetic composite polishing head with different composition ratios was studied. When the mass fraction of each MCF was 55% of iron powder, 30% of water, 12% of cerium oxide and 3% of α-cellulose, the shape and stability of the magnetic composite polishing head Good MCF polishing head; using the proportion of MCF in the MCF polishing equipment developed by the BK7 glass on the fixed-point polishing, positive pressure on the MCF polishing head and BK7 glass surface roughness after polishing study. Through the experimental data analysis, it is found that the positive pressure of polishing increases with the increase of spindle speed, decreases with the increase of eccentricity of magnet, and after 50min fixed-point polishing, the surface roughness decreases from 10.2nm to 6.7nm. The above results show that the preparation of MCF optical glass to meet the needs of ultra-precision polishing.