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表述了ＤＦ激光波段采用ＣａＦ２和硅窗口减反射膜系的结果。分析了设计多层ＡＲ膜的方法并给出用ＺｎＳｅ／ＹｂＦ３和ＺｎＳ／ＹｂＦ３材料组合的双层和五层ＡＲ膜系。计算了各种膜系的理论性能。研究了膜层淀积工艺技术，对于ＣａＦ２和硅窗口，在ＤＦ激光波段实验透过率分别为９９．５４％和９９．８９％，镀ＡＲ膜ＣａＦ２窗口能承受４．３ｋＷ／ｃｍ２的连续波ＤＦ激光辐射。
The results of the DF laser band using CaF2 and silicon window antireflection coatings were described. The method of designing a multilayer AR film was analyzed and two-layer and five-layer AR film systems in combination with ZnSe / YbF3 and ZnS / YbF3 materials were given. The theoretical properties of various membrane systems were calculated. The film deposition technology was studied. The experimental transmittance of CaF2 and Si window in the DF laser band was 99.54% and 99.89%, respectively. The ARF-coated CaF2 window could withstand 4.3kW / cm2 continuous wave DF laser radiation.