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本文采用离子注入、等离子体氮化和等离子体CVD相结合的技术,制备梯度材料,解决了常规气相沉积方法难以实现金属基体到陶瓷涂层薄膜的梯度化问题.制备了附着性好、血液相容性好的Ti6Al-TiN-TiC生物梯度材料.
In this paper, ion implantation, plasma nitridation and plasma CVD combined with the technology, the preparation of gradient materials, to solve the conventional vapor deposition method is difficult to achieve the gradient of the metal substrate to the ceramic coating film. Ti6Al-TiN-TiC bio-gradient materials with good adhesion and good blood compatibility were prepared.