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微纳级别的铝薄膜因宽度和厚度尺寸缩小其试件尺寸接近电极的最小间距、电极间的位置误差等因素的影响,导致电阻率四电极法在测量过程中产生较大的误差。通过对微纳级的导电薄膜的四电极测量法进行数学建模分析,建立了新的四电极测量法数学计算模型,提供精确的电阻率修正系数,并利用基于原子力显微镜的四电极电阻率测量技术精确测量了厚度为400 nm、宽度为30μm的铝薄膜的电阻率,且取不同的作用力重复实验。实验结果证明,基于修正后数学模型的微四电极技术对微纳级别薄膜的电阻率测量方面的准确性和稳定性。
Micro-nano aluminum film due to the width and thickness of the reduced size of the specimen close to the minimum electrode spacing, the electrode position error and other factors, resulting in resistivity four-electrode method in the measurement of greater error. By mathematical modeling and analysis of the four-electrode measurement method of the micro-nano conductive film, a new mathematical model of the four-electrode measurement method is established to provide accurate resistivity correction coefficients. The four-electrode resistivity measurement based on the atomic force microscope The technique accurately measured the resistivity of an aluminum film with a thickness of 400 nm and a width of 30 μm, and repeated experiments with different forces. The experimental results show that the accuracy and stability of the resistivity measurement of micro-nano scale films based on the modified four-electrode technology based on the modified mathematical model.