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在SnO_2气敏薄膜层上覆盖一层或多层钝化材料(SiO_2,Al_2O_3)薄膜,制成的多层膜气敏元件,可很好地排除大分子气体如乙醇等对小分子H_2检测的干扰,使其具有单独检测H_2的功能。本文还通过测量元件的升温曲线,推导出敏感体表面的氧吸附活化能;找出活化能与灵敏度、选择性的关系。根据实验现象和物性分析结果,试着探讨了元件的敏感机理。
The multi-layer membrane gas sensor with one or more layers of passivating material (SiO 2, Al 2 O 3) covered on the SnO 2 gas sensing thin film can well exclude the small molecule H 2 detection by the large gas such as ethanol Interference, it has a separate detection of H_2 function. In this paper, we also deduced the activation energy of oxygen adsorption on the surface of the sensitive body by measuring the temperature rising curve of the component. The relationship between the activation energy and the sensitivity and selectivity was found out. According to the experimental phenomena and physical analysis results, try to explore the sensitive mechanism of the components.