Research of Superconductor Thin Film by Nb Magnetron

• 作 者: A. A. Rossi V. Palmieri
• 机 构: Laboratori Nazionali di Legnaro, Italy,
• 出 处: Annual Report of China Institute of Atomic Energy
• 发表日期: 2004年期
• 关键词: superconductor holder sapphire magnetron silver paint argon sputtering Velocity

The 2 inch Nb magnetron is used. The sample used to deposit for the superconductor thin film is sapphire which is a square with 1 cm side. The sample is fixed on the aluminum sample holder with silver paint. Four samples are deposited in each experiment, and one of them is used to measure the thickness of

The 2 inch Nb magnetron is used. The sample used to deposit for the superconductor thin film is sapphire which is a square with 1 cm side. The sample is fixed on the aluminum sample holder with silver paint. Four samples are deposited in each experiment, and one of them is used to measure the thickness of