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在表面科学研究中,获得10~(-3)帕的清洁真空并不困难.大约10~(-5)帕的极限真空就可以满足大部份工业应用的需要.除了特殊情况而外,真空测量的重复性往往比绝对精度更为重要.然而,低压测量的绝对精度与其它物理量的测量相比是相当低的.最近几年,在真空计量研究中做了大量的工作(新型的标准系统、相互比对、真空规长期性能的研究、新的真空测量原理,如磁悬浮规等).热阴极电离规的低压限制有关的一些新概念主要来自于有大型加速器的实验室.用四极质谱计于分压的测量可以得到更好的重复性.因为仅仅用了电离原理,提供了更好地了解离子源对测量谱的影响.市场上出售的仪器,通常用微机控制(尤其是用于分压测量的仪器),完全适合于真空系统的自动化.
In surface science research, it is not difficult to obtain a clean vacuum of 10 -3 Pa. A vacuum of about 10 -5 Pa meets the needs of most industrial applications. Except for special cases, vacuum Measurement repeatability is often more important than absolute accuracy. However, the absolute accuracy of low-voltage measurements is rather low compared to other physical measurements. In recent years a great deal of work has been done in vacuum metrology (a new standard system , Long-term performance of vacuum gauges, new vacuum measurement principles such as maglev gauges, etc. Some of the new concepts related to the low pressure limitations of hot cathode gauges come primarily from laboratories with large accelerators, using quadrupole mass spectrometry The measurement at partial pressure gives better repeatability because only the ionization principle is used to provide a better understanding of the effect of the ion source on the measurement spectrum.The commercially available instruments are usually microprocessor controlled (especially for Partial pressure measurement of the instrument), fully suitable for the automation of the vacuum system.