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采用有限元方法模拟纳米压痕过程的影响因素较多,依据正交实验原理提出了确定这些影响因素重要性的一种新方法.选取石英玻璃材料的屈服应力、加工硬化指数以及纳米压头的尖端半径为影响因素,由于材料与压头间的接触摩擦对仿真结果影响不大,且试样在进行纳米实验前都要进行抛光打磨处理,故不考虑摩擦系数和表面粗糙度的影响.将仿真结果与实验结果相对误差的绝对值作为正交实验的指标,利用极差分析可知压头半径是影响模拟结果最重要的因素,屈服应力和加工硬化指数只对模拟出的残余深度有一定的影响.同时通过对比模拟和实验的载荷-位移曲线,得到实际压头尖端半径为300nm,石英玻璃的屈服强度为8GPa,加工硬化指数为0.3.
Finite element method is used to simulate the influence process of nanoindentation process, and a new method to determine the importance of these influencing factors is put forward based on the principle of orthogonal experiment.Selecting the yield stress, work hardening index and nanoindentation of quartz glass The tip radius is the influencing factor. Because the contact friction between the material and the indenter has little effect on the simulation results, and the specimen should be polished and polished before the nanometer experiment, the influence of the friction coefficient and the surface roughness will not be considered. The absolute value of the relative error between the simulation result and the experimental result is taken as the index of the orthogonal experiment. Using the range analysis, it can be seen that the pressure head radius is the most important factor that affects the simulation result. The yield stress and the work hardening index are only limited to the simulated residual depth By comparing the simulation and experimental load-displacement curves, the actual tip radius is 300nm, the yield strength of quartz glass is 8GPa and the work hardening index is 0.3.