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从Y1铁电薄膜材料、外延铁电薄膜、介电超晶格、铁电薄膜的制备工艺及原位检测几个方面介绍了铁电薄膜研究的一些新动向。
Some new trends in the research of ferroelectric thin films are introduced from the aspects of the fabrication process of Y1 ferroelectric thin films, epitaxial ferroelectric thin films, dielectric superlattices and ferroelectric thin films.