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电磁六极透镜场分布的边缘效应木崇俊窦菊英陈尔纲(云南大学物理系,昆明650091)电子显微镜发展到现在,分辨率的提高受到电子透镜球差的严重限制。矫正球差成为电镜发展中亟待解决的问题,对矫正球差已有几种方案,其中用电磁六极透镜系统矫正球差是比较可行的方...
Edge Effect of Electromagnetic Hexapole Field Distribution Mu Chong-jun Dou Ju-ying Chen Er-gang (Department of Physics, Yunnan University, Kunming 650091) With the development of electron microscope, the improvement of resolution has been severely restricted by the spherical aberration of electron lens. Correcting spherical aberration has become an urgent issue in the development of electron microscopy, there are several solutions to the correction of spherical aberration, which use electromagnetic six-pole lens system to correct spherical aberration is more feasible ...