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用铝膜作高反射层,氟化镁膜作间隔层,采用双半波二级次与一级次滤亢膜系相结合,制成了2500埃以下波段具有高度自截止的远紫外窄带滤光片。主峰透射率≥25％,通带半宽度为150—180埃,对比度优于200。基本无旁带次峰,解决了不用远紫外玻璃来消除次峰的困难。在制备中,改进了铝膜镀制工艺和厚度控制方法,提高了金属—介质膜滤光片主峰波长定位精度,用普通的镀膜设备研制成功了满足燃化工业所要求的远紫外滤光片。
Using aluminum film as the high reflection layer and the magnesium fluoride film as the spacer layer, a combination of double half-wave second order and first-order filter kong membrane was used to make a band below 2500 angstrom with a far-reaching UV blocking filter Light film. The main peak transmittance ≥ 25%, the passband half width of 150-180 Å, the contrast is better than 200. Substantially no sideband sub-peak, to solve the difficulty of eliminating the second peak without far UV glass. In the preparation, improved aluminum plating process and thickness control method to improve the metal - dielectric film filter main peak wavelength positioning accuracy, with ordinary coating equipment developed to meet the requirements of the fuel oil industry far UV filter .