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薄膜应力的测量一直是一个困难的问题。本文尝试用一种新的方法——X射线衍射-拉伸法,对薄膜的应力进行检测,与侧倾法实验结果相比较,X射线衍射-拉伸法更为准确与可靠。
Membrane stress measurement has always been a difficult issue. This paper attempts to use a new method - X-ray diffraction - stretching method to test the film stress, compared with the experimental results of the roll method, X-ray diffraction - drawing method is more accurate and reliable.