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推导出用于测量半导体载流子输运特性(载流子寿命、载流子扩散系数和前表面复合速度)的调制自由载流子吸收(modulatedfree carrier absorption,MFCA)检测技术的三维理论模型,给出了调制自由载流子吸收检测信号与调制频率和抽运-探测光相对距离的关系.定性分析了在不同调制频率时各个载流子输运参数对径向位置扫描曲线(信号与两束光相对距离的关系)的影响,结果表明调制自由载流子吸收检测信号对各个参数的灵敏度随抽运-探测光相对距离的增加而增加.仿真和实验结果表明,通过拟合不同调制频率时调制自由载流子吸收信号的径向位置扫描曲线能精确确定半导体材料的载流子输运特性.
A three-dimensional theoretical model of the modulated free-carrier absorption (MFCA) detection technique for the measurement of semiconductor carrier transport properties (carrier lifetime, carrier diffusion coefficient and front surface recombination velocity) The relationship between the modulation free carrier absorption detection signal and the modulation frequency and the relative distance of the pump-probe light is given.Secondly, the relationship between the carrier transport parameters and the radial position of the carrier at different modulation frequencies The results show that the sensitivity of the modulated free carrier absorption detection signal to each parameter increases with the relative distance of the pump-probe light. The simulation and experimental results show that the sensitivity of the free-carrier detection signal to the different modulation frequencies When modulated free carrier absorption signal of the radial position of the scanning curve can accurately determine the semiconductor material carrier transport characteristics.