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半导体器件软错误的发生具有几率低、间隔时间长的特点。资源有限条件的下实现对器件软失效率的评估需要借助放射源加速的方法,即加速软失效率测试。作为改进设计和工艺以降低软失效率的前提,就测试方法稳定性进行了系统研究。通过对两种不同制程的静态随机存储器芯片(SRAM)进行α粒子加速软失效率测试,提出了确保α粒子加速测试稳定的方法。基于相同测试条件下多次测量结果变化和测试时间的关系,给出了合理的加速软失效测试的时间推荐值,保证了测试结果的有效性。
The occurrence of soft errors in semiconductor devices has the characteristics of low probability and long interval time. The implementation of resource-limited conditions to evaluate the device soft failure rate requires a method of accelerating the soft failure rate by means of a radioactive source. As a prerequisite to improve the design and process to reduce the soft failure rate, the stability of the test method was systematically studied. A method to ensure the stability of α particle acceleration test is put forward by measuring the soft failure rate of α particle in static random access memory (SRAM) of two different processes. Based on the relationship between the change of multiple measurement results and the test time under the same test conditions, a reasonable time recommendation value for accelerating the soft-fail test is given to ensure the validity of the test results.