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新一代光学纵断面测绘仪使用基于动态聚焦原理的传感器,同扫描探测显微镜一类的普通仪器相比,新仪器的速度要快得多。由德国CBM Messtechnik GmbH研
The new generation of optical profilometers uses sensors based on the principle of dynamic focusing, which is much faster than conventional instruments such as scanning microscopy. Research by CBM Messtechnik GmbH, Germany