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提出了一个用相干分辨的外差干涉仪进行光学系统表面检测的方法。利用相干长度短的光源和位置探测器。该方法具有表面选择性、高分辨率和测量时间短等特点
A method for surface inspection of optical system by using coherence resolving heterodyne interferometer is proposed. Utilize short coherent length light sources and position detectors. The method has the characteristics of surface selectivity, high resolution and short measuring time