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The influence of vibration is already one of main obstacles for improving the nano measuring accuracy.The techniques of anti-vibration,vibration isolation and vibration compensation become an important branch in nano measuring field.Starting with the research of sensitivity to vibration of scanning tunneling microscope(STM),the theory,techniques and realization methods of nano vibration sensor based on tunnel effect are initially investigated,followed by developing the experimental devices.The experiments of the vibration detection and vibration compensation are carried out.The experimental results show that vibration sensor based on tunnel effect is characterized by high sensitivity,good frequency characteristic and the same vibratory response characteristic consistent with STM.
The influence of vibration is already one of main obstacles for improving the nano measuring accuracy.The techniques of anti-vibration, vibration isolation and vibration compensation become an important branch in nano measuring field. Starting with the research of sensitivity to vibration of scanning tunneling microscope (STM), the theory, techniques and realization methods of nano vibration sensor based on tunnel effect are initially investigated, followed by developing the experimental devices. These experiments of the vibration detection and vibration compensation are carried out. The experimental results show that vibration sensor based on tunnel effect is characterized by high sensitivity, good frequency characteristic and the same vibratory response characteristic consistent with STM.