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通过实验和数值模拟研究了聚焦离子束系统中微波离子枪的离子束光学特性，该离子枪由微波等离子体源和Orloff-Swason引出透镜组成。该透镜除了广泛用于场致发射离子枪外，在等离子体源情况下，也能获得很好的离子束光学性能。
The ion beam optical properties of a microwave ion gun in a focused ion beam system were studied experimentally and numerically. The ion gun consisted of a microwave plasma source and an Orloff-Swason extraction lens. In addition to being widely used in field-emission ion guns, the lens achieves good ion beam optical properties at the plasma source.