论文部分内容阅读
Laser self-mixing interference (SMI) wave plate measurement method is a burgeoning technique for its simplicity and efficiency.But for the non-coated sample,the reflected light from the surface can seriously affect the measurement results.To analyze the reason theoretically,a self-consistent model for laser operation with a sub-exteal and an exteal cavity is established,and the sub-exteal cavity formed by the sample and a cavity mirror is proved to be the main error source.A synchronous tuning method is proposed to eliminate the sub-exteal cavity effect.Experiments are carried out on the synchronously tuning double exteal cavities self-mixing interference system,and the error of the system is in the range of-0.435° ~ 0.387° compared with the ellipsometer.The research plays an important role in improving the performance and enlarging the application range of the laser self-mixing interference system.