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为满足透明体表面形貌定量测量的需要,研制成功了透射式微分干涉显微测量系统,该系统包括透射式微分干涉显微镜,CCD摄像机,检偏器旋转驱动部件,计算机及相关测量软件。介绍了测量原理、公式、相移干涉方法以及将一台普通反射式干涉显微镜,改装成透射式微分干涉相衬显微镜的关键技术。利用改装好的装置对几种透明体的形貌进行了重构。结果表明:该系统较好地解决了透明体表面形貌的重构问题,在一般实验室条件下,无须采取任何隔振和环境控制措施,测量系统重复性、稳定性均优于2nm,测量范围不受半个波长的限制,有广阔的应用前景。
In order to meet the requirement of quantitative measurement of surface morphology of transparent bodies, a transmissive differential interference microscopic measurement system was successfully developed. The system consists of a transmission differential interference microscope, a CCD camera, an analyzer rotational drive, a computer and related measurement software. The principle of measurement, the formula, the method of phase shift interference and the key technology of converting a common reflection interference microscope into a transmissive differential interference phase contrast microscope are introduced. The morphologies of several transparent bodies were reconstructed using a modified device. The results show that the system solves the problem of the reconstruction of the surface morphology of the transparent body better. Under normal laboratory conditions, no vibration isolation and environmental control measures are required. The repeatability and stability of the measurement system are better than 2 nm. The range is not limited by half the wavelength, has broad application prospects.