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Porous silicon (PSi) prepared from Pt metal-assisted chemical etching (MaCE) was demonstrated to possess higher hydrosilylation efficiency (～57%) than anodized PSi (～11%) by surface reaction with ω-undecenyl alcohol (UO).Deconvolution of the SiHx (x=1-3) stretching bands revealed the abundance of SiH 2 species on MaCE PSi was 53%,～10% higher than on anodized samples,while both of SiH 1 and SiH 3 were ～5% lower correspondently on MaCE PSi than on anodized samples.The surface SiHx abundances were suggested to account for the higher hydrosilylation efficiency on MaCE PSi.Optimization of Pt-assisted chemical etching parameters suggested a 7-15 nm thick Pt-coating and an etching time of 3-10 min for biochip applications.Scanning electron microscopy images revealed that an isotropic top meso-porous layer was beneficial for hydrosilylation and long-term durability under ambient conditions.To end,an example of histidine-tagged protein immobilization and microarray was illustrated.Combining the materials’ property,surface chemistry,and micro-fabrication technology together,we envision that silicon based biochip applications have a prosperous future.
Porous silicon (PSi) prepared from Pt metal-assisted chemical etching (MaCE) was demonstrated to possess higher hydrosilylation efficiency (-57%) than anodized PSi (~ 11%) by surface reaction with ω-undecenyl alcohol the SiHx (x = 1-3) stretching bands revealed the abundance of SiH 2 species on MaCE PSi was 53%, ~ 10% higher than on anodized samples, while both SiH 1 and SiH 3 were ~ 5% lower correspondently on MaCE PSi than on anodized samples. The surface SiHx abundances were suggested to account for the higher hydrosilylation efficiency on MaCE PSi. Optimization of Pt-assisted chemical etching parameters suggested a 7-15 nm thick Pt-coating and an etching time of 3-10 min for biochip applications. Scanning electron microscopy images revealed that an isotropic top meso-porous layer was beneficial for hydrosilylation and long-term durability under ambient conditions. To end, an example of histidine-tagged protein immobilization and microarray was illustrated. Comb ining the materials’ property, surface chemistry, and micro-fabrication technology together, we envision that silicon based biochip applications have a prosperous future.