论文部分内容阅读
本文阐述了多孔Al_2O_3薄膜湿敏元件的感湿机理及其电特性,提出Al_2O_3薄膜的感湿特性是以物理吸附为基础的,并基于这个模型,研究了表面导电机理和Al_2O_3的介电特性。通过理论计算得到了与实验结果相一致的C-RH、R-RH的关关系曲线,得到了元件感湿后电特性的变化是由于介电特性的变化引起的结论。在实验中,摸索到解决元件长期稳定性问题的工艺方法。
In this paper, the humidity sensing mechanism and electrical properties of porous Al 2 O 3 thin film sensors are described. The sensing properties of Al 2 O 3 thin films are based on physical adsorption. Based on this model, the surface conduction mechanism and the dielectric properties of Al 2 O 3 are studied. The correlation curves of C-RH and R-RH, which are consistent with the experimental results, are obtained theoretically. The change of the electrical characteristics after the element is wetted is the result of the change of dielectric properties. In the experiment, grope to solve the long-term stability of the components of the process method.