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微执行器作为微机械系统的核心单元,一直是微机械发展的关键.文章介绍了一种应用于管道微机器人的足式压电执行器.在交变电压作用下,该压电执行器将压电体的弯曲振动转化成其弹性足沿管壁的移动,从而实现执行器的运动.在分析其工作原理的基础上,研制了压电微执行器的驱动电源,并进行了简单的实验研究.研究表明该执行器具有结构简单,易于微型化,响应快,驱动方便等特点.“,”As the key components,micro actuators can show the development of Micro Electric Mechanical System(MEMS).In this paper,a micro piezoelectric actuator with legs of a micro robot that can move in a miniature pipe is proposed.By the piezoelectric effect,the bending vibration of the piezoelectric elements are transferred into the walking motion of the legs.The work principle of the actuator is studied,and the mobile mechanism is analyzed by kinema...