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在生长用于焦平面列阵的高质量(Hg,Cd)Te薄膜方面,液相外延(LPE)是优先选用的技术。在生产环境中成功执行这一流程需要研究先进的传感器和流程控制技术,这样可以提高产量,降低成本。本文将评论得克萨斯仪器公司的智能处理焦平面列阵计划所取得的进展。(Hg,Cd)Te液相外延薄膜是在(111)B取向的(Cd,Zn)Te衬底上生长的,衬底放在盛有大量(4500g)碲镉汞熔液的垂直浸渍反应中。在一个生长周期中,总面积为54cm~2的多个(多达8个)衬底可通过反应器。为这种生长流程而正在研制的传感器和控制技术包括:(1)用以探测液相外延生长熔液液相线温度的涡流分析(ECA),(2)用来在生长之后立即快速测量薄膜组分的电子束微探针波长色散x射线分析(WDX),(3)用以测定生长熔液上汞分压的紫外/可见光光学吸收光谱学,(4)基于电阻温度器件(RTD)的精确温度控制系统,该系统可使温控能力从±0.1℃提高到±0.02℃。人们发现,涡流分析敏感样品液相外延熔体中正在冷却的结晶作用的开始。波长色散x射线分析技术是一种用来测量生长过程中薄膜组分的快速而精确的测量方法。本文讨论了这些焦平面列阵智能处理传感嚣和控制技术对总产量和可生产性的影响。
Liquid-phase epitaxy (LPE) is a preferred technique for growing high quality (Hg, Cd) Te films for use in focal plane arrays. Successful implementation of this process in a production environment requires research on advanced sensor and process control technologies to increase throughput and reduce costs. This article reviews Texas Instruments’ smart-processing focal plane array project’s progress. (Hg, Cd) Te liquid-phase epitaxial films were grown on (111) B-oriented (Cd, Zn) Te substrates in a vertical immersion reaction with a large amount of . In one growth cycle, multiple (up to eight) substrates with a total area of 54 cm 2 can pass through the reactor. Sensors and control technologies being developed for this growth process include: (1) eddy current analysis (ECA) to detect the liquidus temperature of the liquid phase epitaxial growth melt, (2) rapid measurement of the film thickness immediately after growth (WDX), (3) UV / Visible optical absorption spectroscopy to determine the partial pressure of mercury on the growth melt, (4) based on a resistance temperature device (RTD) Accurate temperature control system that increases temperature control from ± 0.1 ° C to ± 0.02 ° C. It has been found that the onset of crystallization that is cooling in the liquid phase epitaxial melt of the swirling analysis sensitive sample. Wavelength dispersive X-ray analysis is a fast and accurate measurement method for measuring the composition of thin films during growth. This article discusses the impact of these focal plane array smart processing sensing and control techniques on total yield and manufacturability.