论文部分内容阅读
一、开发背景与目标现在谁也不能否认现代电子学的惊人发展是以硅器件的集成化技术为核心的。为赶上这一形势,光器件也开始向集成化的道路迈进。无论是电子器件,还是光器件,它们向集成化方向发展是技术发展的趋势,是理所当然的。大部分光器件有必要与电子电路相结合,人们期望通过光器件与电子电路集成化,也就是光电集成电路(OEIC)来解决在其连接部分由分布电容引起的频率退化和感应等问
First, the development of the background and objectives Now no one can deny that the amazing development of modern electronics is based on silicon integrated technology as the core. To catch up with this situation, optical devices also began to move toward integration. Whether it is electronic devices, or optical devices, their development toward integration is a trend of technological development, it is a matter of course. Most optical devices need to be combined with electronic circuits. It is expected that optical devices and electronic circuits, that is, optoelectronic integrated circuits (OECs), are expected to solve the problem of frequency degradation and inductance caused by distributed capacitance in their connection