论文部分内容阅读
针对传统激光功率计体积庞大、响应速度慢且检测精度难以保证的缺陷,提出了一种基于高性能黑硅MEMS热电堆的激光功率测试方法。该测试方法利用激光的热效应,以CO2激光器为被测激光光源,黑硅MEMS热电堆探测器为激光探测传感器。根据能量转换原理,热电堆吸收激光辐射的能量转换为自身热力学能,热力学能以电压的形式输入CMOS接口电路。通过TopView2000通用虚拟仪器应用软件采集和处理数据,获得激光功率相关数据。在室温条件下,对MEMS热电堆激光功率检测系统在不同占空比和不同出光时间的CO2激光照射下,进行重复实验。结果表明,在激光输出占空比为30%、总出光时间为150 ms条件下,系统热响应时间为14.92ms,计算出激光功率值为23.01 W,测量相对偏差为0.55%,满足了实际应用中对激光功率高精度、低成本、低功耗、强便携性等的需求。
Aiming at the defects of large volume, slow response and difficult detection accuracy of traditional laser power meter, a laser power measurement method based on high performance black silicon MEMS thermopile is proposed. The test method utilizes the thermal effect of a laser, uses a CO2 laser as the laser light source under test, and a black silicon MEMS thermopile detector as a laser detection sensor. According to the energy conversion principle, the thermopile absorbs the energy of the laser radiation and converts it into its own thermodynamic energy. Thermodynamics can be input into the CMOS interface circuit in the form of voltage. Through TopView2000 universal virtual instrument application software to collect and process data, get the laser power related data. At room temperature, repeated experiments were conducted on the MEMS thermopile laser power detection system under CO2 laser irradiation with different duty cycles and different light-emitting times. The results show that the thermal response time of the system is 14.92ms when the laser output duty ratio is 30% and the total light output time is 150ms. The calculated laser power is 23.01 W and the relative deviation is 0.55%, which satisfies the practical application In the laser power of high precision, low cost, low power consumption, strong portability and other needs.