• 不 限
  • 期刊论文
  • 硕博论文
  • 会议论文
  • 报 纸
  • 英文论文
  2. 您的位置
  3. 首页
  4. 期刊论文
  5. REQUIREMENT OF SILICON FLATNESS FOR SILICON DIRECT BONDING TECHNOLOGY

REQUIREMENT OF SILICON FLATNESS FOR SILICON DIRECT BONDING TECHNOLOGY

来源 :Journal of Electronics(China) | 被引量 : 0次 | 上传用户：hfutnyd
【摘 要】
：
The influence of silicon slice flatness on bonding technology and the relation between a foreign particle and resulting bubble are quantitatively presented by t
【作 者】
：
黄庆安 付兴华 陈军宁 童勤义 
【机 构】
：
MicroelectronicsCenter,SoutheastUniversity,Nanjing210018,Nanjing210018
【出 处】
：
Journal of Electronics(China)
【发表日期】
：
1994年4期
【关键词】
：
BONDING TECHNOLOGY SILICON material FLATNESS Double crystal DIFFRACTOMETRY Bondi 
下载到本地 , 更方便阅读
下载此文 赞助VIP
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
The influence of silicon slice flatness on bonding technology and the relation between a foreign particle and resulting bubble are quantitatively presented by the elastic theory. It is demonstrated experimentally by X-ray double crystal diffractometry and
其他文献
DIRECTIVITY OPTIMIZATION OF CURVED SURFACE DIPOLE ANTENNAS
Based on the calculation of the characteristic parameters by moment method, the curved surface dipoles are optimized by an optimization method, the maximum dire
期刊
ANTENNASCurvedSURFACEDIPOLESDIRECTIVITYOPTIMIZATIONMOMENTmethodAntennas
APPLYING FAST WALSH TRANSFORM TECHNIQUE TO ANALYZE HIGH-SPEED DIGITAL INTEGRAL TRANSMISSION LINES
A new approach, based on the waveform relaxation technique and fast Walsh trans-form, is presented to analyze the coupled loosy transmission lines (CLTL) with a
期刊
INTEGRALtransmissionlineFASTWALSHTRANSFORMWAVEFORMRELAXATIONIntegral tra
两种不同灌肠液在泌尿系统造影中的应用
目的:探讨两种不同灌肠液在泌尿系统造影中的干预效果及疗效的满意度。方法:随机选择观察组和对照组各80例,对照组采用常规肥皂水清洁灌肠,观察组采用温开水清洁肠道。结果:
期刊
尿路造影术灌肠人类
A NOVEL PHASE CONTROL TECHNIQUE FOR INJECTION LOCKED OSCILLATORS
A novel technique to obtain injection locked oscillators phase tuning beyond 180° is demonstrated. The idea is to cascade injection locked oscillators toge
期刊
PHASECONTROLLOCKINGOscillatorsANTENNAARRAYPhase control Locking Oscillat
A NEW METHOD OF DOPPLER CENTROID ESTIMATION FOR SPACEBORNE SAR -AMPLITUDE CORRELATION METHOD
The linear relationship between Doppler centroid and range walking in spaceborne SAR data is analyzed, and a new method to estimate Doppler centroid is proposed
期刊
SPACEBORNEsyntheticAPERTUREradarRangeWALKINGDOPPLERCENTROIDestimationAM
桥梁承台大体积混凝土施工
桥梁承台属于大体积混凝土施工。混凝土内外温差较大时,会使混凝土产生温度裂缝,影响结构安全和正常使用。大体积混凝土结构温度裂缝与骨料品种、配合比、外加剂掺合料、浇筑
期刊
大体积混凝土桥梁承台施工施工措施温度测控
A NEW MULTIFUNCTION SWITCHED-CURRENT FILTER
A new switched-current(SI)biquadratic filter is presented which can simultaneouslyprovide the low-pass,high-pass and band-pass filters in a single building bloc
期刊
ACTIVEFILTERSSwitched-currentCIRCUITTHEORYanddesignActive filtersSwitch
A DECISION FEEDBACK EQUALIZER FOR NON-LINEAR CHANNELS
A Simple and useful decision feedback equalizer used for non-linear channels with severe linear distortion and mild non-linear distortion is proposed. It is a c
期刊
AdaptiveEQUALIZATIONNON-LINEARCHANNELSDECISIONFEEDBACKEQUALIZERSAdaptive
ELECTROMAGNETIC WAVE PROPAGATION IN MAGNETIC MULTILAYERS-NON-RECIPROCAL REFLECTIONS’
A theory of EM wave propagation through magnetic multilayers and superlattices is presented based on the propagation matrix of a magnetic film. By using the P m
期刊
ElectromagneticwavepropagationMAGNETICMULTILAYERSEMtransmissionandREFLEC
COMPLEX RAY EXPANSION OF PLANE WAVE
Based on the high frequency approximation theory, the complex ray expansion of plane wave is derived. The results obtained may be regarded as the basis of the n
期刊
WAVEPROPAGATIONPLANEWAVECOMPLEXRAYWave propagation Plane wave Complex ra