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一、真空微电子学及其应用领域真空微电子学是近年来迅速崛起的一门新学科。它是指采用集成电路中的精细加工技术制造的微型冷阴极电子源,并以此为基础制作如表1所示的各种高频放大器、集成电路和显示装置等的学科。1988年被国际电气和电子学工程师学会(IEEE)的电子器件学会(Electron Device Society)所承认,并举办了第一次“国际真空微电子学会议(International VacuumMicroelectronics Conference),并在国际电子器件会议(IEDM)中设置了一个议题。国际真空电子学会议(CVMC)开过三次,各国论文发表状况如图1所示。本文将以国际会议的论文为中心,阐述以微型冷阴极
First, the vacuum microelectronics and its applications Vacuum microelectronics is the rapid rise in recent years, a new discipline. It refers to the micro-cold cathode electron source manufactured using the fine processing technology in the integrated circuit, and based on which, various kinds of high-frequency amplifiers, integrated circuits and display devices as shown in Table 1 are produced. Recognized by the Electron Device Society of the International Institute of Electrical and Electronics Engineers (IEEE) in 1988 and hosted the first International Vacuum Microelectronics Conference and presented at the International Electron Devices Conference (IEDM) set a topic in the International Vacuum Electronics Conference (CVMC) opened three times, papers published in various countries as shown in Figure 1. This paper will be the papers of the International Conference Center, elaborated on the micro-cold cathode