论文部分内容阅读
C-SiC coatings were prepared on stainless steel with magnetron sputtering deposi-tion followed by Argon ion bombardment. These samples were implanted by 5 keV hydrogen ion beam. SEM, SIMS and IR transmission were utilized to study the mechanism and the stability of hydrogen retention of C-SiC coatings. Comparison was made between the samples with and without removing Argon by heating then followed by H+ ion implantation. The results show that removal of argon by heating can improve the hydrogen retention of the C-SiC coatings. The thermal stability of hydrogen barrier for the C-SiC coatings was investigated, it is found that the property of hydrogen retention for the C-SiC coatings is still good after heating at 573 K, but it becomes worse after heating at 873 K, and it loses after heating at 1 173 K.
C-SiC coatings were prepared on stainless steel with magnetron sputtering deposi- tion followed by Argon ion bombardment. These samples were implanted by 5 keV hydrogen ion beam. SEM, SIMS and IR transmission were utilized to study the mechanism and the stability of hydrogen retention Comparison was made between the samples with and without removing Argon by heating then followed by H + ion implantation. The results show that removal of argon by heating can improve the hydrogen retention of the C-SiC coatings. The thermal stability of hydrogen barrier for the C-SiC coatings was investigated, it is found that the property of hydrogen retention for the C-SiC coatings is still good after heating at 573 K, but it becomes worse after heating at 873 K, and it loses after heating at 1 173 K.