TiO2薄膜/锡掺杂玻璃光波导元件对苯乙烯蒸气的气敏性研究

• 作 者: 吐尔孙阿依·阿木丁 海力前木·卡地尔 阿布力孜·伊米提
• 机 构: 新疆大学化学化工学院,新疆伊犁师范学院化学与生物科学学院,
• 出 处: 分析科学学报
• 发表日期: 2013年05期
• 关键词: Optical waveguide sensor Volatile organic gas TiO2 thin nano film Styrene

本文将溶胶-凝胶法制备的溶胶采用浸渍提拉法固定在锡掺杂玻璃光波导元件表面,通过500℃热处理得到TiO2薄膜,且对低浓度的苯乙烯蒸气进行检测。从实验得知,该传感元件在挥发性有机气体浓度(体积分数)低到5.0×10-5时只对苯乙烯有响应,此时其他气体毫无响应,并在1.0×10-6～5.0×10-4范围之内对苯乙烯有较好的响应。响应时间和恢复时间分别为12s和34s。该传感器具有灵敏度高、响应快、可逆性和重复性好、易制作等特点。

In this paper, the sol prepared by sol-gel method was fixed on the surface of tin-doped glass optical waveguide by dipping and pulling method. The TiO2 film was obtained by heat treatment at 500 ℃, and the low concentration of styrene vapor was detected. It has been experimentally found that the sensor responds only to styrene when the VOC concentration (volume fraction) is as low as 5.0 × 10 -5, and the other gases are not responding at 1.0 × 10 -6 ~ 5.0 × 10-4 range of styrene has a good response. Response time and recovery time were 12s and 34s. The sensor has high sensitivity, fast response, reversibility and repeatability, easy to make and so on.