Structural Analysis and Calculation for the Radiation Baffle of Cryopumps

• 作 者: 王娟 欧阳峥嵘 朱武 胡纯栋
• 机 构: Institute of Man-Machine-Environment Beijing University of Aeronautics and Astronautics,Beijing 1000
• 出 处: Plasma Science & Technology
• 发表日期: 2005年04期
• 关键词: Chevron pumped satisfactory pumping calculating gases inlet economical deviation

To decrease the radiation heat load of the cryopanel is considered to be necessary for the design of cryopumps. In general, a radiation baffle is mounted between the cryopanel and the heat source. The radiation baffle absorbs the majority of the radiated heat load. However, the motion of molecules to be pumped is baffled and the pumping speed is lowered at the same time. Therefore the selection of a good radiation baffle is a very important issue for the economical operation of the cryopump. By calculating and comprehensively analyzing the thermal transmission coefficients and the molecular transmission coefficients of baffles of different structures, a type of Chevron baffle is found to be more satisfactory. This paper focuses on the application of the Monte Carlo Method involved in the process of analysis and calculation.

To decrease the radiation heat load of the cryopanel is considered to be necessary for the design of cryopumps. In general, a radiation baffle is mounted between the cryopanel and the heat source. However, the motion of molecules to be pumped is baffled and the pumping speed is lowered at the same time. The calculation of a good radiation baffle is a very important issue for the economical operation of the cryopump. and the molecular transmission coefficients of baffles of different structures, a type of Chevron baffle is found to be more satisfactory. This paper focuses on the application of the Monte Carlo Method involved in the process of analysis and calculation.