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1.前言加热物体被周围气体所传导的热量随气压而变化,利用此原理制造的皮拉尼(热传导型)真空计有比较简单的测量电路,即使在大气压下工作也不会损坏,适用于一般工业上的真空度测量。由于压强高于10托和低于10~(-3)托时,气体热传导和压强的关系较小,在此压强范围内,用通常的白金丝皮拉尼真空计测量压强是困难的。为了在上述压强范围内使真空
1. Introduction The heating of objects by the surrounding gas conduction heat varies with air pressure, using this principle Pirani (heat conduction type) vacuum gauge has a relatively simple measurement circuit, even at atmospheric pressure will not be damaged, is suitable for General industrial vacuum measurement. Since the relationship between gas heat transfer and pressure is small for pressures above 10 torr and below 10 to 3 Torr, it is difficult to measure the pressure in this pressure range with a typical platinum-pirani vacuum gauge. In order to make the vacuum within the above pressure range