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本文报道了我所最近研制成功的用于分子束外延的反射式高能电子衍射仪的用途、性能及特点。并介绍和讨论了调试结果。
This article reports on the use, performance and features of a reflective high energy electron diffractometer developed by our institute recently for molecular beam epitaxy. And introduced and discussed the debugging result.