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本文回顾了表面声波(Surface acoustic wave,SAW)的种类、器件装置和各自的基本原理,全面论述了SAW传感器在国内外的发展情况,着重评述了SAW器件装置作为一种化学传感器在气相和液相领域的应用,并展望了表面声波传感器在生命科学及其他领域的应用前景。
This paper reviewed the types of surface acoustic wave (SAW), device devices and their respective basic principles. The development of SAW sensors at home and abroad was comprehensively reviewed. The SAW device was reviewed as a chemical sensor in gas phase and liquid Phase field applications, and prospects of the surface acoustic wave sensor in the life sciences and other fields of application prospects.