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应用实际工作状态的边界条件计算了金刚石膜中的热应力分布，并用实验手段进行 了验证．结果认为，金刚石膜的热应力沿径向是不均匀的，中间的热应力要比边部的大，主要是 压应力．这种很大的压应力，容易引起金刚石膜的炸裂．
The thermal stress distribution in diamond films was calculated by using the boundary conditions of actual working conditions and verified by experimental methods. The results show that the thermal stress of diamond films is not uniform in the radial direction, the middle of the thermal stress than the large, mainly compressive stress. This great compressive stress, easily lead to diamond film burst.