Influences of Y_2O_3 dopant content on residual stress,structure,and optical properties of ZrO_2 thi

• 作 者: 肖祁陵 邵淑英 邵建达 范正修
• 机 构: R and D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics,Chine
• 出 处: Chinese Optics Letters
• 发表日期: 2004年期
• 关键词: compressive evaporation dopant refractive tensile molar amorphous tetragonal att

Four kinds of Y2O3 stabilized ZrO2 (YSZ) thin films with different Y2O3 contents (from 0 to 12 mol%) are deposited on BK7 glass substrates by electron-beam evaporation method. The effects of different Y2O3 dopant contents on residual stress,structure,and optical properties of ZrO2 thin films are investigated. The results show that residual stress in YSZ thin films varies from tensile to compressive with the increase of Y2O3 molar content. The addition of Y2O3 is beneficial to the crystallization of YSZ thin film and transformation from amorphous to high temperature phase,and the refractive index decreases with the increase of Y2O3 molar content. Moreover,the variations of residual stress and the shifts of refractive index correspond to the evolution of structures induced by the addition of Y2O3.

The kinds of Y2O3 stabilized ZrO2 (YSZ) thin films with different Y2O3 contents (from 0 to 12 mol%) are deposited on BK7 glass substrates by electron-beam evaporation method. The effects of different Y2O3 dopant contents on residual stress, structure, and The results show that residual stress in YSZ thin films varies from tensile to compressive with the increase of Y2O3 molar content. The addition of Y2O3 is beneficial to the crystallization of YSZ thin film and transformation from amorphous to high temperature phase, and the refractive index decreases with the increase of Y2O3 molar content. Moreover, the variations of residual stress and the shifts of refractive index correspond to the evolution of structures induced by the addition of Y2O3.