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采用磁控溅射法制备了不同C含量的NbVCN薄膜,研究了C含量对NbVCN薄膜微观结构、力学及摩擦磨损性能的影响。结果表明:四元NbVCN薄膜微观结构受C含量影响显著,当C含量小于6.3%,薄膜为fcc-NbN+hcp-NbN两相共存;随含量的进一步升高,薄膜中出现非晶石墨相,此时薄膜三相共存,为fcc-NbN+hcp-NbN+amorphous-graphite。NbVCN薄膜硬度随C含量的升高先上升后下降,当C含量为6.3%时,薄膜硬度最高,其最高值为29 GPa。室温下,NbVCN薄膜平均摩擦系数随C含量的升高逐渐降低,当C含量为15.3%时,薄膜平均摩擦系数最低,其最低值为0.34;随C含量的升高,NbVCN薄膜磨损率先降低后升高,当C含量为6.3%时,薄膜磨损率达到最小值,其最小值为1.86×10~(-8)mm~3·N~(-1)mm~(-1)。环境温度在200~700℃时,C含量为6.3%的薄膜的平均摩擦系数随着温度的升高逐渐降低,在700C时,薄膜获得最低摩擦系数,其最低值为0.53;薄膜的磨损率随温度的升高逐渐升高。
The films of NbVCN with different C contents were prepared by magnetron sputtering. The effects of C content on the microstructure, mechanical properties and friction and wear properties of NbVCN films were investigated. The results show that the microstructure of quaternary NbVCN film is significantly affected by the C content. When the C content is less than 6.3%, the films coexist in two phases of fcc-NbN + hcp-NbN. With the further increase of the content, amorphous graphite phase appears in the film, At this point the three films co-exist as fcc-NbN + hcp-NbN + amorphous-graphite. The hardness of NbVCN films firstly increases and then decreases with the increase of C content. When the C content is 6.3%, the film hardness is the highest, with the highest value of 29 GPa. The average friction coefficient of NbVCN films decreases with the increase of C content at room temperature. When the C content is 15.3%, the average friction coefficient of NbVCN films is the lowest, with the lowest value of 0.34. With the increase of C content, the wear rate of NbVCN films first decreases When the C content is 6.3%, the wear rate of the film reaches the minimum value, the minimum value is 1.86 × 10 -8 mm 3 · N -1 mm -1. The average friction coefficient of films with C content of 6.3% decreases with the increase of temperature at ambient temperature of 200-700 ℃. The lowest coefficient of friction is obtained at 700 C with the lowest value of 0.53. The wear rate The temperature rises gradually.