使用有毒气体装置需要有完善的安全系统——MOCVD装置的解决方法

• 作 者: John G.Posa 王景义
• 出 处: 微细加工技术
• 发表日期: 1988年01期
• 关键词: MOCVD 有毒气体 分解炉 处理装置 联锁机构 保险功能 保险系统 四段 活性炭 调查对象

在LSI制造中有很多工艺使用有毒气体。这次把美国公司的MOCVD作为考察制造装置对安全要求的调查对象。作者主张在生产现场掌握MOCVD技术需要加强安全措施和充实保险系统。很多活性炭排气处理装置适于MOCVD。热分解炉安在反应管后,进一步提高排毒效率。根据重要程度,在联锁机构上,使之具有四段保险功能,利用双重O环密封控制金属与石英部件间的泄漏。

There are many processes that use toxic gases in LSI manufacturing. This time, MOCVD of U.S. companies was used as a survey object to examine safety requirements of manufacturing equipment. The author argues that mastering MOCVD technology at the production site requires strengthening safety measures and enriching the insurance system. Many activated carbon exhaust treatment devices are suitable for MOCVD. Thermal decomposition furnace installed in the reaction tube, to further improve the detoxification efficiency. According to the degree of importance, in the interlocking mechanism, it has four insurance functions, the use of double O-ring seal control between metal and quartz parts leakage.