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钛酸铅■(Pb,La)TiO_3(简称PLT)铁电陶瓷薄膜可望在红外探测器、光波导、声表面波器件等光电子学及其它高技术领域中获得广泛的应用. 1988年日本学者Kyoichi Takayama等人用磁控溅射方法制备了PLT薄膜,并用它制成了高灵敏度的单元和多元热释电红外探测器[1].用该方法制备PLT薄膜,除了需要昂贵、复杂的设备外,还难以控制薄膜的化学计量比,从而使其应用受到一定限制.近年来,人们用溶胶—凝胶方法研制了Pb(Zr,Ti)O_3(PZT)和(Pb,La)(Zr,Ti)O_3(PLZT)等陶瓷薄膜[2],其工艺不仅简单,而且薄膜的热处理温度低,化学计量比准确、均匀(可达分子级水平),结构可控,成膜面积大. 本文采用溶胶—凝胶法,先将Ti(OC_4H_9)_4,Pb(CH_3COO)_2和La(NO_3)_3溶于有机溶剂甲醇中(加入少量酸),经充分搅拌混合形成清彻的溶胶,再使其发生水解,缩聚合等反应,用匀胶法在单晶硅基片
Lead Titanate ■ (Pb, La) TiO_3 (referred to as PLT) Ferroelectric ceramic thin films are expected to find wide applications in optoelectronics and other high-tech fields such as infrared detectors, optical waveguides, surface acoustic wave devices, etc. In 1988, Kyoichi Takayama et al. Prepared a PLT film by magnetron sputtering and used it to fabricate high-sensitivity and multivariate pyroelectric infrared detectors.1 PLT films were prepared by this method, except for expensive and complicated equipment (Pb, La) (Zr, Ti) O 3 (PZT) and (Pb, La) have been developed by sol-gel method in recent years, Ti) O_3 (PLZT) ceramic thin film [2], the process is not only simple, but also the thin film heat treatment temperature is low, stoichiometric accurate and uniform (up to the molecular level), structure controllable, Sol-gel method, first Ti (OC_4H_9) _4, Pb (CH_3COO) _2 and La (NO_3) _3 are dissolved in organic solvent methanol (add a small amount of acid), stir and mix to form a clear sol, Hydrolysis, polycondensation and other reactions, with a uniform glue method in the monocrystalline silicon substrate