论文部分内容阅读
激光波长的细分,单频激光有光学方法和电气方法,在已有的测长干涉仪中,前者不超过半波长的8细分,后者不超过半波长的32细分。双频激光采用电气锁相倍频,实现了半波长的36细分。对某些精密测长和微定位,这还是不够的。应用单频激光相位细分和双频激光比相细分,可对半波长实现1800以上细分。其精度优于半波长的百分之一,并可望达到波长的千分之一。可用于良好环境中长度、小角度的精密测定和微定位;在各种场合做激光干涉测长仪的空气折射率修正辅助干涉仪是十分适宜的。本文介绍了测量原理,分析了各项误差,介绍了一些实验情况和应用措施。
Laser wavelength subdivision, single-frequency laser with optical and electrical methods, in the existing length-measuring interferometer, the former no more than half the wavelength of the 8 subdivision, which does not exceed the half-wavelength 32 subdivision. Dual-frequency laser using electrical phase lock frequency, to achieve a 36-wavelength half-subdivision. For some precision length measurement and micro-positioning, this is not enough. The application of single-frequency laser phase subdivision and dual-frequency laser phase subdivision, half wavelength can achieve more than 1800 subdivisions. Its accuracy is better than one percent of the half-wavelength and is expected to reach one-thousandth of the wavelength. It can be used for precise measurement and micro-positioning of medium and small angles in good environment. It is very suitable to make the auxiliary instrument of air refractive index correction in the laser interferometer length measuring instrument in various occasions. This article describes the measurement principle, analyzes the errors, introduces some experimental conditions and application measures.