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本文利用金相分析、Ｘ射线衍射等方法，对ＨＦＣＶＤ法沉积金刚石薄膜时使用的钨丝和钽丝在不同碳化条件下灯丝成分和结构变化作了分析研究，解释了碳化钽丝表面色泽金黄的原因，并在相同沉积条件下，比较了使用碳化和未碳化灯丝对生长金刚石薄膜的影响．结果表明，使用碳化灯丝生长的金刚石薄膜的石墨含量少，金刚石膜的质量和生长速度有所提高．
In this paper, the composition and structure of the filaments of tungsten wire and tantalum wire used in the deposition of diamond films by HFCVD were analyzed by metallographic analysis and X-ray diffraction. The results showed that the surface color of the tantalum carbide wire was golden The reason, and under the same deposition conditions, the effect of using carbonized and uncarbonized filaments on the growth of diamond films was compared. The results show that diamond films grown using carbonized filaments have less graphite content and improved diamond film quality and growth rate.