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在用文题淀积方法制备出氮化钛、碳氮化钛和碳氮氧化钛硬质涂层的基础上,用表面分析手段分别进行了成分、结构分析、形貌观察和硬度测定。结果表明:以二乙胺基钛为原料可分别在773K和973K淀积氮化钛和碳氮化钛涂层;用钛酸异丙酯和钛酸丁酯可分别在973K和1073K获得碳氮氧化钛涂层。所得的涂层表面光洁度高、与基体附着性好、硬度满足实用要求。相比于普通化学气相淀积方法,本法在制备硬质涂层上有两大优点:(1)淀积温度降低,扩大了基体的选用范围;(2)固溶体涂层的获得扩大了涂层的适用范围。
Based on the preparation of titanium nitride, titanium carbonitride and hard carbonitrides, the composition, structure, morphology and hardness of the coatings were determined by surface analysis. The results show that titanium nitride and titanium carbonitride coatings can be deposited at 773K and 973K, respectively, using diethylamino titanium as starting material; carbonitride can be obtained at 973K and 1073K with isopropyl titanate and butyl titanate respectively Titanium oxide coating. The resulting coating surface finish, and the substrate adhesion, hardness to meet the practical requirements. Compared with ordinary chemical vapor deposition method, this method has two advantages in the preparation of hard coating: (1) the deposition temperature is reduced, expanding the selection of the scope of the substrate; (2) the availability of solid solution coating to expand the coating The scope of application.