Low-cost method of fabricating large-aperture,high efficiency,Fresnel diffractive membrane optic usi

• 作 者: 张健 栗孟娟 阴刚华 焦建超 刘正坤 徐向东 付绍军
• 机 构: National Synchrotron Radiation Laboratory,University of Science and Technology of China,Beijing Inst
• 出 处: Chinese Optics Letters
• 发表日期: 2016年10期
• 关键词: fabricating technique optic Fresnel alignment aperture grating silica reflective

To reduce the cost and achieve high diffraction efficiency,a modified moire technique for fabricating a largeaperture multi-level Fresnel membrane optic by a novel design of alignment marks is proposed.The modified moire fringes vary more sensitively with the actual misaUgnment.Hence,the alignment accuracy is significantly improved.Using the proposed method,a 20 urn thick,four-level Fresnel diffractive polyimide membrane optic with a 200 mm diameter is made,which exhibits over 62%diffraction efficiency into the+1 order,and an efficiency root mean sauare of 0.051.

To reduce the cost and achieve high diffraction efficiency, a modified moire technique for fabricating a large aperture multi-level Fresnel membrane optic by a novel design of alignment marks is proposed. The modified moire fringes vary more sensitively with the actual misaUgnment .ence, the alignment accuracy is significantly improved. Using the proposed method, a 20 urn thick, four-level Fresnel diffractive polyimide membrane optic with a 200 mm diameter is made, which exhibits over 62% diffraction efficiency into the + 1 order, and an efficiency root mean sauare of 0.051.