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采用自组装成膜技术制备里TiO2薄膜,应用X射线光电子能谱研究自组装膜及其氧化膜和淀积的TiO2薄膜，结果表明，硅烷偶联剂成功地组装在玻璃基片上，足够长时间的氧化对使端基（-SH）完全氧化为磺酸基，淀积在基片上的TiO2膜牢固性好，平均膜厚在10nm．淀积膜中的钛可能有几种不同的氧化态，不同的酸度影响TiO2的淀积效果
The self-assembled film was used to prepare the TiO2 film. The X-ray photoelectron spectroscopy was used to study the self-assembled film, the oxide film and the deposited TiO2 film. The results showed that the silane coupling agent was successfully assembled on the glass substrate for a sufficient time Of the oxidation of the end group (-SH) completely oxidized to sulfonic acid group, deposited on the substrate TiO2 film fastness, the average film thickness of 10nm. The deposition of titanium in the film may have several different oxidation states, different acidity affect the deposition of TiO2