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YBCO superconducting films were prepared by Electron Beam Coevaporation method.All the YBCO films were annealed at 760°C in humidity range of 2.3-?9.5.Microstructure of the YBCO thin films was analyzed by means of X-ray diffraction(XRD) and scanning electron microscopy(SEM).Superconducting properties of the YBCO films were measured by electromagnetic induction method.XRD results showed that c-axis-oriented grains existed in the YBCO films.Morphologies of the YBCO films showed that all the films had a smooth and crack-free surface.YBCO films prepared at 7.3% humidity condition showed Jc value of 4.6 MA cm-2 at 77 K in self-field.
YBCO superconducting films were prepared by Electron Beam Coevaporation method. All the YBCO films were annealed at 760 ° C in humidity range of 2.3-? 9.5. Microstructure of the YBCO thin films was analyzed by means of X-ray diffraction (XRD) and scanning electron microscopy (SEM). Superconducting properties of the YBCO films were measured by electromagnetic induction method. XRD results were that c-axis-oriented grains existed in the YBCO films. Morphologies of the YBCO films showed that all the films had a smooth and crack -free surface. YBCO films prepared at 7.3% humidity condition showed Jc value of 4.6 MA cm-2 at 77 K in self-field.