论文部分内容阅读
本文介绍一种用于分子束外延(MBE)装置中的俄歇电子能谱仪(简称AES)。为了尽量简化结构,首次采用了电子、离子复合同轴枪的设计方案。由于电子束和离子束是在同一对称轴上,从而很好地解决了一向认为很难实现的对中问题。借助于样品方位的改变,该AES仪器又可兼作中能电子衍射仪(MEED)用。当入射电子束的能量E_P=3keV,束流I_P=1～10μA时,能量分辨率△E/E_P(?)0.5％,信噪比I_s/I_N(?)400(对Ag),其主要技术指标与商品典型AES仪器相近。
This article describes an Auger electron spectrometer (AES) for molecular beam epitaxy (MBE). In order to try to simplify the structure, for the first time using the electronic, ion coaxial coaxial gun design. Since the electron beam and the ion beam are on the same axis of symmetry, the problem of alignment, which has always been considered difficult to achieve, is well solved. With the help of the change of orientation of the sample, the AES instrument can double as the medium electron diffraction (MEED). When the energy of the incident electron beam E_P = 3keV, the beam current I_P = 1 ~ 10μA, the energy resolution △ E / E_P (?) 0.5%, the signal to noise ratio I_s / I_N (?) 400 The indicator is similar to a typical AES instrument.