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为了研究硬质合金表面激光微织构对涂层性能的影响,利用光纤激光在硬质合金基体表面制备具有不同深度、直径及密度的微织构。采用CC800/9XL型超高真空多功能磁控溅射系统在硬质合金表面制备TiAlN涂层。通过Leica DM2500 M透射光学显微镜、扫描电镜分析了TiAlN涂层的表面形貌。利用MFT-4000型涂层附着力自动划痕仪对涂层-基体结合力进行表征。结果表明:激光微织构工艺能提高硬质合金基体与TiAlN涂层的结合力,比基体表面未织构工艺提高了近5倍。
In order to study the influence of the laser micro-texture on the coating performance, the micro-texture with different depth, diameter and density was prepared on the surface of the cemented carbide substrate by fiber laser. TiAlN coating was prepared on the cemented carbide surface by CC800 / 9XL ultra-high vacuum multi-functional magnetron sputtering system. The surface morphology of the TiAlN coating was analyzed by scanning electron microscopy using a Leica DM2500 M transmission light microscope. The coating-matrix bond strength was characterized using an automatic scratch tester MFT-4000 coating adhesion. The results show that the laser micro-texture technology can improve the bonding strength between the cemented carbide substrate and the TiAlN coating, which is nearly five times higher than that of the un-textured substrate.