Experimental studies of N~+ implantation into CVD diamond thin films

来源 :中国科学：技术科学英文版 | 被引量 : 0次 | 上传用户：hanfeizifly

【摘要】

：

The effects of N+ implantation under various conditions on CVD diamond films were analyzed with Raman spectroscopy, four-point probe method, X-ray diffraction (

【作者】

：

辛火平林成鲁王建新邹世昌石晓红林梓鑫周祖尧刘祖

【机构】

：

NationalLaboratoryofFunctionalMaterialsforInformatics,ShanghaiInstituteofMetallurgy,ChineseAcademyof

【出处】

：

中国科学：技术科学英文版

【发表日期】

：

1997年4期

【关键词】

：

N+ IMPLANTATION into diamond films Raman SPECTROSCOPY ultraviolet photoluminesce

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The effects of N+ implantation under various conditions on CVD diamond films were analyzed with Raman spectroscopy, four-point probe method, X-ray diffraction (XRD), Rutherford backseattering spectroscopy (RBS), ultraviolet photoluminescence spectroscopy

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Experimental studies of N~+ implantation into CVD diamond thin films

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