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为了解决MEMS器件在加工过程中在线高度检测的困难,提出了一种基于激光光切法的MEMS器件高度在线检测方法.首先建立了用以验证激光光切法有效性的高度在线检测系统;然后提出了一种基于阈值分割、数学形态学、逐行扫描法和加权最小二乘法的快速激光中心线提取算法.实验表明,建立的高度在线检测系统的最大平均误差及误差的均方差分别为-6.38μm和1.87μm,且检测一次高度的时间为1.03 s.因此,激光光切法可以用于MEMS器件高度的在线检测.
In order to solve the problem of on-line height detection of MEMS devices in the process of machining, a method of on-line height detection of MEMS devices based on laser light cutting is proposed.Firstly, a highly on-line detection system is established to validate the effectiveness of laser light cutting A fast laser centerline extraction algorithm based on threshold segmentation, mathematical morphology, progressive scanning and weighted least square method is proposed.The experiments show that the maximum average error and the mean square error of the established on-line detection system are - 6.38μm and 1.87μm, and the time to detect a height of 1.03 s.Therefore, laser light cutting method can be used for the on-line detection of MEMS device height.